Wafer robot, RWS/D
Wafer robots are high-speed manipulators designed for precise handling of lightweight loads. They are often used in cleanrooms for transferring silicon wafers, optical elements, or other lightweight components. Hiwin’s wafer robots are also available in dual-arm models, doubling their handling capacity.
Features:
- Models for 0.5 kg and 2 kg loads
- Reach: 135 or 185 mm
- Z-axis options: 340/400/500 mm
- Repeatability: ± 0.1 mm
- Speed: 750 mm/s
Wafer Aligner
The HIWIN Wafer Aligner is an alignment system for the semiconductor industry that automatically centers and aligns wafers before the next process step. Precise alignment ensures that each wafer enters the process in the correct position, improving process repeatability and reducing disruptions caused by alignment errors. Thanks to its compact design, the system can be easily integrated into both new and existing production equipment.
Features
- Automatic wafer centering, alignment, and angle correction
- Notch detection for various wafer materials
- Ultra-compact design
- Centering accuracy: ±0.1 mm
- Angular positioning accuracy: ±0.2°
- Alignment time: less than 5.9 seconds
- Suitable for semiconductor automation applications
